@article{Stamou_1999
author = {Spyros Stamou and E. Amanatides and Dimitris Mataras},
title = {SPATIAL DISTRIBUTION OF OPTICAL EMISSION IN SiH4/H2 RF DISCHARGES},
journal = {High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes},
issn = {1093-3611},
year = {1999},
volume = {3},
number = {2-3},
pages = {255--261}
}