@article{Stamou_1999 author = {Spyros Stamou and E. Amanatides and Dimitris Mataras}, title = {SPATIAL DISTRIBUTION OF OPTICAL EMISSION IN SiH4/H2 RF DISCHARGES}, journal = {High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes}, issn = {1093-3611}, year = {1999}, volume = {3}, number = {2-3}, pages = {255--261} }