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Interfacial Phenomena and Heat Transfer

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ISSN Печать: 2169-2785

ISSN Онлайн: 2167-857X

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EXPERIENCE IN THE SYNTHESIS OF DIAMOND FROM A SUPERSONIC MICROWAVE PLASMA JET

Том 7, Выпуск 2, 2019, pp. 131-137
DOI: 10.1615/InterfacPhenomHeatTransfer.2019031315
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Краткое описание

In this paper, the traditional method of microwave plasma generation is used in combination with the formation of a high-velocity plasma flow from a resonant chamber into an evacuated deposition chamber. In the experiments, a modernized magnetron with power up to 3 kW at a frequency of 2.45 GHz is used. The calculations of the microwave plasma formation process make, in practice, it possible to estimate the optimal geometry of the discharge chamber for an acceptable distribution of the electromagnetic field in the discharge region. The gas-dynamic calculations give an estimate of the approximate content of atomic hydrogen at the deposition surface. The results of the work determine ways for further research on the synthesis of diamond from high-speed microwave plasma jets.

Ключевые слова: nanoparticles, diamond coatings, microwave plasma, gas jet
ЛИТЕРАТУРА
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ЦИТИРОВАНО В
  1. Rebrov A. K., Emelyanov A. A., Plotnikov M. Yu., Timoshenko N. I., Yudin I. B., Synthesis of Diamond from a High-Velocity Microwave Plasma Flow, Doklady Physics, 65, 1, 2020. Crossref

  2. Rebrov A. K., Emelyanov A. A., Plotnikov M. Yu., Timoshenko N. I., Terekhov V. V., Yudin I. B., EFFECT OF THE GAS MIXTURE FLOW RATE ON THE PROCESS OF DIAMOND SYNTHESIS FROM A HIGH-VELOCITY MICROWAVE PLASMA, Journal of Applied Mechanics and Technical Physics, 61, 5, 2020. Crossref

  3. Yelisseyev A.P., Emelyanov A.A., Rebrov A.K., Timoshenko N.I., Yudin I.B., Gromilov S.A., Titov A.T., Plotnikov M.Yu, Structure of a diamond deposited from microwave plasma by a new gas-jet method, International Journal of Refractory Metals and Hard Materials, 94, 2021. Crossref

  4. Tarkov S M, Antonov V A, Podlesny S N, Yemelyanov A A, Rebrov A K, Popov V P, Volodin V A, Vdovin V I, Timoshenko N I, Yudin I B, Nadolinny V A, Applicability of gas-jet MPCVD polycrystalline diamond films on silicon with NV centers in quantum magnetometry, Journal of Physics: Conference Series, 2119, 1, 2021. Crossref

  5. Emel’yanov A. A., Plotnikov M. Yu., Rebrov A. K., Timoshenko N. I., Yudin I. B., The Use of a Supersonic Jet of Gas Activated in a Microwave Discharge in Diamond Deposition, Fluid Dynamics, 56, 1, 2021. Crossref

  6. Emelyanov A A, Plotnikov M Yu, Timoshenko N I, Yudin I B, Effective cooling of substrates with low thermal conductivity under conditions of gas-jet MPCVD diamond synthesis, Journal of Physics: Conference Series, 2119, 1, 2021. Crossref

  7. Emelyanov A A, Plotnikov M Yu, Rebrov A K, Timoshenko N I, Yudin I B, Deposition of diamond from the jet activated in the microwave discharge of gases, Journal of Physics: Conference Series, 1677, 1, 2020. Crossref

  8. Emelyanov A A, Pinaev V A, Plotnikov M Yu, Rebrov A K, Timoshenko N I, Yudin I B, Effect of methane flow rate on gas-jet MPCVD diamond synthesis, Journal of Physics D: Applied Physics, 55, 20, 2022. Crossref

  9. Zhong Nanya, Fu Gang, Li Junjun, Lian Chen, Chen Wenqi, Huang Kama, A novel two‐dimensional atmospheric pressure plasma jet device, Plasma Processes and Polymers, 19, 4, 2022. Crossref

  10. Emelyanov A. A., Pinaev V. A., Plotnikov M. Yu., Rebrov A. K., Timoshenko N. I., Yudin I. B., OPTICAL AND GAS-DYNAMIC MEASUREMENTS IN A MICROWAVE DISCHARGE PLASMA FLOW UNDER CONDITIONS OF GAS-JET SYNTHESIS OF DIAMOND, Journal of Applied Mechanics and Technical Physics, 63, 3, 2022. Crossref

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