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Atomization and Sprays
Editor-in-Chief Europe: Günter Brenn (open in a new tab)
Editor-in-Chief Americas: Marcus Herrmann (open in a new tab)
Редактор-основатель: Norman Chigier (open in a new tab)

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ISSN Печать: 1044-5110

ISSN Онлайн: 1936-2684

The Impact Factor measures the average number of citations received in a particular year by papers published in the journal during the two preceding years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) IF: 1.2 To calculate the five year Impact Factor, citations are counted in 2017 to the previous five years and divided by the source items published in the previous five years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) 5-Year IF: 1.8 The Immediacy Index is the average number of times an article is cited in the year it is published. The journal Immediacy Index indicates how quickly articles in a journal are cited. Immediacy Index: 0.3 The Eigenfactor score, developed by Jevin West and Carl Bergstrom at the University of Washington, is a rating of the total importance of a scientific journal. Journals are rated according to the number of incoming citations, with citations from highly ranked journals weighted to make a larger contribution to the eigenfactor than those from poorly ranked journals. Eigenfactor: 0.00095 The Journal Citation Indicator (JCI) is a single measurement of the field-normalized citation impact of journals in the Web of Science Core Collection across disciplines. The key words here are that the metric is normalized and cross-disciplinary. JCI: 0.28 SJR: 0.341 SNIP: 0.536 CiteScore™:: 1.9 H-Index: 57

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THIN-FILM FORMATION BY USING FLASH-BOILING SPRAY

Том 25, Выпуск 1, 2015, pp. 23-45
DOI: 10.1615/AtomizSpr.2014010393
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Краткое описание

A method for controlling evaporation by using chemical vapor deposition (CVD) with a mixed solution is proposed. In this method, called "flashing spray CVD", a mixed solution is transported through an injector at the top of the vacuum CVD chamber. The solution is evaporated by flashing when the chamber pressure is below the saturated vapor pressure of the solution, leading to formation of a lean, homogeneous vapor. This homogeneous vapor is then reacted with oxygen to form a film. In this paper, tetraethoxysilane (TEOS) was used as the precursor, and n-pentane was used as the low-boiling-point organic solvent because of its improvement of TEOS vaporization characteristics. The slit nozzle injector for the ambient condition was selected on the basis of spray shape revealed by optical measurements. Homogeneous SiO2 films on 300 mm diameter wafers could be formed by flashing spray CVD, and a slit nozzle that can be used to make films on wafers larger than 300 mm was produced. The best slit angle was determined from the results of magnification photography; LIF-Mie scattering was used in double-slit nozzles with various slit-to-slit angles, and the spray shapes obtained with those nozzles were compared using backlight photography. The best slit angle was found to be 180 degand the best slit-to-slit angle was found to be 120 deg.

Ключевые слова: chemical vapor deposition, spray, flash boiling, precursor
ЦИТИРОВАНО В
  1. OSHIMA Motohiro, YONEDA Anna, ASAKAWA Noto, MATSUMURA Eriko, SENDA Jiro, ISHIDA Kozo, Proposal of flame synthesis method for nanoparticles using flash boiling spray (TiO<sub>2</sub> particle characteristics influenced by injection condition and equivalence ratio), Transactions of the JSME (in Japanese), 82, 840, 2016. Crossref

  2. Xiao Di, Yukihiko Ichikawa, Li Xuesong, Hung David, Nishida Keiya, Xu Min, Film breakup of tilted impinging spray under various pressure conditions, International Journal of Engine Research, 21, 2, 2020. Crossref

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