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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
SJR: 0.137 SNIP: 0.341 CiteScore™: 0.43

ISSN Печать: 1093-3611
ISSN Онлайн: 1940-4360

Выпуски:
Том 23, 2019 Том 22, 2018 Том 21, 2017 Том 20, 2016 Том 19, 2015 Том 18, 2014 Том 17, 2013 Том 16, 2012 Том 15, 2011 Том 14, 2010 Том 13, 2009 Том 12, 2008 Том 11, 2007 Том 10, 2006 Том 9, 2005 Том 8, 2004 Том 7, 2003 Том 6, 2002 Том 5, 2001 Том 4, 2000 Том 3, 1999 Том 2, 1998 Том 1, 1997

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.v1.i4.70
pages 485-492

EXCITED SPECIES AND C-ATOM DENSITY DOWNSTREAM AN Ar PLASMA TORCH WITH OLEFINS (CH4, CF4) IN IMPURITY

Andre Ricard
Universite de Toulouse; UPS, INPT; LAPLACE (Laboratoire Plasma et Conversion d'Energie), Bat. 3R2, 118 route de Narbonne, F-31062 Toulouse cedex 9, France; CNRS, LAPLACE, F-31062 Toulouse, France
S. Al Ayoubi
Laboratoire Genie Precedes Plasmas - ENSCP 11, rue Pierre et Marie Curie - 75005 Paris- France
S. Cavadias
Laboratoire Genie Precedes Plasmas - ENSCP 11, rue Pierre et Marie Curie - 75005 Paris- France
Jacques Amouroux
Laboratoire de Genie des Precedes Plasmas Universite P. et M. Curie, ENSCP 11 rue P. et M. Curie 75005 Paris France

Краткое описание

Excited species in an Ar plasma torch (40 MHz, 3 kW) with hydro- and halo-carbons in impurity have been analysed by emission spectroscopy. Two types of quantitative results have been obtained. The first one concerns the vibrational temperature of radicals. The vibrational temperatures of C2 and CN molecules have been found to increase from 4 to 6 × 103 K when going from an Ar-l%o CH4 to an Ar – l%o CF4 gas mixture. Such temperature values are a first step to analyse the departure to LTE inside the plasma jet and to appreciate the stabilization of HF molecule produced in Ar-H2-CF4 plasma torch. A second quantitative result is the determination of C-atom in impurity in the post-discharge of Ar-CH4 plasma torch. The C-atom density determined in a post-discharge tube by chemiluminescent reaction with N atoms, at a time of 3 × 10−2 sec. after the Ar plasma torch, was found in the order of 1019 m−3 with 10−3 CH4 into Ar, that is the ppm range (10-6 ratio of the total density).


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