Краткое описание

Polymer-like hydrogenated amorphous carbon nitride (a-CN_x:H) nanoparticles are observed in a CH₄(50 %)/N₂(50 %) rf plasma. SEM micrographs show that the dust particles are spherical with diameters in the range 0.2-1.1 μm for rf powers in the range 40-120 W. They are trapped in the plasma bulk volume. The absorption spectra of the a-CN_x:H particles reveal the presence of C-H, C=N and C≡N bonds. The absorption peak intensities strongly depend on the incident rf power. The C≡N triple bonds increase with the rf power whereas the C-H bonds decrease.