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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

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ISSN Печать: 1093-3611

ISSN Онлайн: 1940-4360

The Impact Factor measures the average number of citations received in a particular year by papers published in the journal during the two preceding years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) IF: 0.4 The Immediacy Index is the average number of times an article is cited in the year it is published. The journal Immediacy Index indicates how quickly articles in a journal are cited. Immediacy Index: 0.1 The Eigenfactor score, developed by Jevin West and Carl Bergstrom at the University of Washington, is a rating of the total importance of a scientific journal. Journals are rated according to the number of incoming citations, with citations from highly ranked journals weighted to make a larger contribution to the eigenfactor than those from poorly ranked journals. Eigenfactor: 0.00005 The Journal Citation Indicator (JCI) is a single measurement of the field-normalized citation impact of journals in the Web of Science Core Collection across disciplines. The key words here are that the metric is normalized and cross-disciplinary. JCI: 0.07 SJR: 0.198 SNIP: 0.48 CiteScore™:: 1.1 H-Index: 20

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IN SITU IR OPTICAL MEASUREMENTS OF GAS PROPERTIES IN A CAPACITIVELY COUPLED RF Ar/SiH4 PLASMA

Том 9, Выпуск 1, 2005, pp. 159-171
DOI: 10.1615/HighTempMatProc.v9.i1.130
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Краткое описание

Laser diagnostic studies of capacitively coupled rf discharges containing silane diluted in argon have received considerable attention in order to understand the dust particles' formation and behaviour. The formation mechanism of those macroscopic particulates needs to be clarified to enhance the product control in the surface processing industry. In situ Fourier Transform infrared absorption spectroscopy (FTIR) and Cavity Ring-Down Spectroscopy (CRDS) in the mid-infrared wavelength range have been performed to monitor their composition during the growth process. On the one hand, FTIR results particularly indicate time dependency of the solid-state vibrational absorptions of the SiH and SiH3 bands. They also show the silane dissociation after plasma ignition. CRDS, on the other hand, has been applied to the carbon monoxide molecule to investigate the potency of the diagnostic on future silane measurements. Some preliminary ring-down results point out a detection range for the absorbance in the order of 10−5. These two diagnostic techniques prove to be valuable process-monitoring tools.

ЦИТИРОВАНО В
  1. Verbraak H., Ngai A.K.Y., Persijn S.T., Harren F.J.M., Linnartz H., Mid-infrared continuous wave cavity ring down spectroscopy of molecular ions using an optical parametric oscillator, Chemical Physics Letters, 442, 1-3, 2007. Crossref

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