00753cmm\\2200181\\\4500001001300000003000800013005001700021006001900038007001500057008005500072024003700127037009700164040002100261245013900282260002700421300001300448856011000461apnAxdNVYE3MCtReBHI20240105000621.0m||||f|||d||||||||cz|mz|||||||ar184467440737095498400105s\\\\xxu||||f||d|\||||\||eng\\ a10.1615/HighTempMatProc.v1.i4.70 bBegell House Digital Libraryffilegpdfc$35.00 (for download)c$ optional (for subscribers) aCtReBHIcCtReBHI10aEXCITED SPECIES AND C-ATOM DENSITY DOWNSTREAM AN Ar PLASMA TORCH WITH OLEFINS (CH4, CF4) IN IMPURITYh[pdf file] aNYbBegell Housec1997 apdf file40qpdfuhttp://dl.begellhouse.com/download/article/791fb7574d8ca0aa/article.pdfzRequires login and password