Главная > Begell House авторы, редакторы и рецензенты
A.A. Goryachev
Institute of Microelectronics of Russian Academy of Sciences, Universitetskaya 21, 150000 Yaroslavl, Russia
Articles:
PLASMA STIMULATED GROWTH OF THIN FILMS - Vol. 1 '1999 - Progress in Plasma Processing of Materials, 1999
STUDY OF LOW TEMPERATURE PLASMA-STIMULATED GROWTH OF YSZ THIN FILMS ON Si SUBSTRATE - Vol. 1 '1999 - Progress in Plasma Processing of Materials, 1999