Главная > Begell House авторы, редакторы и рецензенты
Y. H. Lee
Dept. of Materials Engineering, Sungkyunkwan University, 300 Chunchun-dong, Suwon, Kyunggi-do, 440-746 Korea
Articles:
THE STUDY OF ATMOSPHERIC PRESSURE PLASMA BY CAPILLARY DIELECTRIC COVERED ELECTRODE AND ITS APPLICATION TO PHOTORESIST ETCHING AND SURFACE CLEANING - Vol. 0 '2003 - Progress in Plasma Processing of Materials, 2003