RT Journal Article
ID 6d24a48d29f4b4fd
A1 Dresvin, Sergey V.
A1 Shi, Nguen Quoc
A1 Ivanov, D.
A1 Amouroux, Jacques
T1 CALCULATION OF RF PLASMA TORCH PARAMETERS BY MEANS OF NON-EQUILIBRIUM MODEL OF AR PLASMA
JF High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
JO HTM
YR 2011
FD 2012-03-20
VO 15
IS 1
SP 7
OP 13
K1 modeling
K1 ICP analysis
K1 non-equilibrium
K1 cold channel
K1 2T model
AB Calculation of RF plasma torch parameters was made by means of non-equilibrium model of plasma. In this study it was calculated RF ICP plasma torch by frequency 28 MHz; power 2-4 kW, inner diameter of the torch 24 mm, plasma gas - argon. Plasma torch has three axial gas flows: sheath gas G1 = 20 l/min, plasma gas G2 = 2.4 l/min, transport gas G3 = 3.4 l/min. Calculations have been performed within the frame of the method of the control volume. The results show that the injection of transport gas in the axis plasma zone leads to a strong disturbance of a thermal equilibrium and a cooling of the axis zone.
PB Begell House
LK https://www.dl.begellhouse.com/journals/57d172397126f956,3163f759560dc3ff,6d24a48d29f4b4fd.html