RT Journal Article ID 6d24a48d29f4b4fd A1 Dresvin, Sergey V. A1 Shi, Nguen Quoc A1 Ivanov, D. A1 Amouroux, Jacques T1 CALCULATION OF RF PLASMA TORCH PARAMETERS BY MEANS OF NON-EQUILIBRIUM MODEL OF AR PLASMA JF High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes JO HTM YR 2011 FD 2012-03-20 VO 15 IS 1 SP 7 OP 13 K1 modeling K1 ICP analysis K1 non-equilibrium K1 cold channel K1 2T model AB Calculation of RF plasma torch parameters was made by means of non-equilibrium model of plasma. In this study it was calculated RF ICP plasma torch by frequency 28 MHz; power 2-4 kW, inner diameter of the torch 24 mm, plasma gas - argon. Plasma torch has three axial gas flows: sheath gas G1 = 20 l/min, plasma gas G2 = 2.4 l/min, transport gas G3 = 3.4 l/min. Calculations have been performed within the frame of the method of the control volume. The results show that the injection of transport gas in the axis plasma zone leads to a strong disturbance of a thermal equilibrium and a cooling of the axis zone. PB Begell House LK https://www.dl.begellhouse.com/journals/57d172397126f956,3163f759560dc3ff,6d24a48d29f4b4fd.html