RT Journal Article
ID 1f5f299236ffc8b9
A1 Isupov, Mikhail
A1 Fedoseev, Alexander
A1 Sukhinin , G. I.
T1 LOW-FREQUENCY INDUCTIVE TRANSFORMER-TYPE DISCHARGE FOR LARGE-SCALE PLASMA PROCESSING
JF High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
JO HTM
YR 2014
FD 2016-01-05
VO 18
IS 4
SP 299
OP 309
K1 inductively coupled plasma
K1 electrodeless discharge
K1 large scale plasma processing
AB The electrophysical and thermophysical characteristics of a low-frequency (100 kHz) inductive transformer-type discharge have been investigated at an argon pressure of 10−100 Pa, discharge currents of 1−10 A, and a discharge chamber diameter of 230 mm. A self-consistent radial model of the low-frequency inductive transformer-type discharge based on the assumption of the Maxwellian electron energy distribution function and on the simultaneous solution of the balance equations for the electron and metastable atom densities, electron energy, and gas temperature, has been developed. The dependences of the electric field strength, electron and gas temperatures, electron density on the argon pressure and discharge current are calculated. It is shown that the numerical results are in satisfactory agreement with the results given by the probe and with the electric field strength measurements.
PB Begell House
LK https://www.dl.begellhouse.com/journals/57d172397126f956,707a764820ecd171,1f5f299236ffc8b9.html