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MODEL OF PE-CVD APPARATUS: ELECTRICAL FIELDS AND DEPOSITION GEOMETRY

Volume 1, Edição 3, 2010, pp. 215-229
DOI: 10.1615/SpecialTopicsRevPorousMedia.v1.i3.30
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RESUMO

Our study focuses on the simulation of thin film deposition processes that can be realized by PE-CVD (plasma enhanced chemical vapor deposition) processes (Geiser and Arab, 2010; Ohring, 2002; Tai and Chou, 1990). The transport processes can be modelled with porous media models in different permeable layers (Geiser and Arab, 2010). For the deposition process, the influence of the electric fields in a plasma reactor is very important and can homogenize the deposited layers (Rudniak, 1998). This aspect of controlling deposition in a reactor can be modelled as permeable layers to accelerate or retard a deposition species in the porous media. A macro-model of the physical processes on the scale of the apparatus is presented as a multiphysics model. The flux field can be solved independently by a Navier-Stokes equation, while the tranport process is solved by a convection-diffusion reaction equation with the computed flux field embedded in it. In addition, the convection-diffusion reaction equation underlies sorption processes which simulate the transport of gaseous species in the apparatus in a given vector field with mobile and immobile zones (Geiser and Arab, 2010). We consider the same spatial grid for the equations and update the velocity field (Fein, 2004). The numerical experiments can give qualitative rates of deposition under the influence of the electric field (Rudniak, 1998). Furthermore, we have simulated the intricate geometry of the metallic plates to give homogeneous deposition in the channels.

CITADO POR
  1. Geiser Jürgen, Model order reduction for numerical simulation of particle transport based on numerical integration approaches, Mathematical and Computer Modelling of Dynamical Systems, 20, 4, 2014. Crossref

  2. Geiser J., Arab M., Modeling and Simulation of a Chemical Vapor Deposition, Journal of Applied Mathematics, 2011, 2011. Crossref

  3. Geiser Jürgen, Multiscale modelling and splitting approaches for fluids composed of Coulomb-interacting particles, Mathematical and Computer Modelling of Dynamical Systems, 24, 4, 2018. Crossref

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