%0 Journal Article
%A Bogaerts, Annemie
%A De Bleecker, Kathleen
%A Georgieva, Violeta
%A Herrebout, Dieter
%A Kolev, Ivan
%A Madani, Myriam
%A Neyts, Erik
%D 2005
%I Begell House
%N 3
%P 321-344
%R 10.1615/HighTempMatProc.v9.i3.10
%T Numerical modeling for a better understanding of gas discharge plasmas
%U https://www.dl.begellhouse.com/journals/57d172397126f956,45a516c014412ac1,3802b0201ac88373.html
%V 9
%X We present here some of our modeling efforts for gas discharge plasmas, used in a number of applications in materials science. Different kinds of modeling approaches are applied, including fluid models, particle-in-cell Monte Carlo (PIC-MC) models and hybrid Monte Carlo fluid models, for the plasma behavior, as well as molecular dynamics simulations for thin film growth. The application fields include the deposition of amorphous hydrogenated carbon layers (diamond-like carbon) from hydrocarbon plasmas, the dust formation in silane discharges, the surface treatment with dielectric-barrier discharges, magnetron discharges used for sputter-deposition, dual-frequency capacitively coupled radio-frequency (cc-rf) discharges in CF4/Ar/N2, for etching applications, and glow discharges for spectrochemical analysis of materials.
%8 2005-11-01