%0 Journal Article %A Bogaerts, Annemie %A De Bleecker, Kathleen %A Georgieva, Violeta %A Herrebout, Dieter %A Kolev, Ivan %A Madani, Myriam %A Neyts, Erik %D 2005 %I Begell House %N 3 %P 321-344 %R 10.1615/HighTempMatProc.v9.i3.10 %T Numerical modeling for a better understanding of gas discharge plasmas %U https://www.dl.begellhouse.com/journals/57d172397126f956,45a516c014412ac1,3802b0201ac88373.html %V 9 %X We present here some of our modeling efforts for gas discharge plasmas, used in a number of applications in materials science. Different kinds of modeling approaches are applied, including fluid models, particle-in-cell — Monte Carlo (PIC-MC) models and hybrid Monte Carlo — fluid models, for the plasma behavior, as well as molecular dynamics simulations for thin film growth. The application fields include the deposition of amorphous hydrogenated carbon layers (diamond-like carbon) from hydrocarbon plasmas, the dust formation in silane discharges, the surface treatment with dielectric-barrier discharges, magnetron discharges used for sputter-deposition, dual-frequency capacitively coupled radio-frequency (cc-rf) discharges in CF4/Ar/N2, for etching applications, and glow discharges for spectrochemical analysis of materials. %8 2005-11-01