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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

年間 4 号発行

ISSN 印刷: 1093-3611

ISSN オンライン: 1940-4360

The Impact Factor measures the average number of citations received in a particular year by papers published in the journal during the two preceding years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) IF: 0.4 The Immediacy Index is the average number of times an article is cited in the year it is published. The journal Immediacy Index indicates how quickly articles in a journal are cited. Immediacy Index: 0.1 The Eigenfactor score, developed by Jevin West and Carl Bergstrom at the University of Washington, is a rating of the total importance of a scientific journal. Journals are rated according to the number of incoming citations, with citations from highly ranked journals weighted to make a larger contribution to the eigenfactor than those from poorly ranked journals. Eigenfactor: 0.00005 The Journal Citation Indicator (JCI) is a single measurement of the field-normalized citation impact of journals in the Web of Science Core Collection across disciplines. The key words here are that the metric is normalized and cross-disciplinary. JCI: 0.07 SJR: 0.198 SNIP: 0.48 CiteScore™:: 1.1 H-Index: 20

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PLASMA SOURCE WITH A COLD HOLLOW CATHODE BASED ON ARC DISCHARGE

巻 17, 発行 2-3, 2013, pp. 127-135
DOI: 10.1615/HighTempMatProc.2015013718
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要約

This paper presents the results of investigation into the generation of a gas-discharge plasma by an arc source with a cold hollow cathode. The source produces a plasma of density ~1010−1011 cm−3 in a volume of ~0.5 m3 at a discharge current of up to 120 A, a discharge operating voltage of 30−40 V, and at a pressure of 0.1−1 Pa. The motion of a cathode spot in crossed electric and magnetic fields inside the hollow cathode and a special cathode design make it possible to preclude almost completely the penetration of the sputtered cathode material into the working chamber and to increase the lifetime of the cathode. Because the cathode spot operates at an integrally cold surface of the hollow cathode, the source allows generation of a chemically active gas plasma.

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