年間 4 号発行
ISSN 印刷: 1093-3611
ISSN オンライン: 1940-4360
Indexed in
INFLUENCE OF HYDROGEN PLASMA TREATMENT ON THE STRUCTURE AND OPTICAL PROPERTIES OF TIN OXIDE THIN FILM PRODUCED BY MAGNETRON SPUTTERING
要約
The influence of glow discharge hydrogen plasma treatment on undoped tin dioxide thin films has been studied. The films with thickness of ∼ 350 nm have been prepared by a method of magnetron sputtering in argon-oxygen atmosphere on glass substrate. Temperature of the substrate was 200 °C. It has been shown that these films were amorphous just after fabrication; their polycrystalline structure was formed during annealing and it was worsened after processing in the hydrogen plasma. The dependences of structural and optical properties of SnOx films from various regimes of treatment by hydrogen plasma and the annealing in air at temperature of 550 °C have been investigated. The values of optical parameters, density and porosity of SnOx films after different regimes of treatment were found. Correlation between the structural and optical properties of tin oxide films is discussed.
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Dmitrieva E. A., Mukhamedshina D. M., Beisenkhanov N. B., Mit’ K. A., The effect of NH4F and NH4OH on the structure and physical properties of thin SnO2 films synthesized by the sol-gel method, Glass Physics and Chemistry, 40, 1, 2014. Crossref
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Mukhamedshina D.M., Beisenkhanov N.B., Mit' K.A., Valitova I.V., Botvin V.A., Investigation of properties of thin oxide films SnOx annealed in various atmospheres, Thin Solid Films, 495, 1-2, 2006. Crossref
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Mukhamedshina D. M., Mit’ K. A., Beisenkhanov N. B., Dmitriyeva E. A., Valitova I. V., Influence of plasma treatments on the microstructure and electrophysical properties of SnO x thin films synthesized by magnetron sputtering and sol–gel technique, Journal of Materials Science: Materials in Electronics, 19, S1, 2008. Crossref
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Chen Wei, Ghosh Debraj, Chen Shaowei, Large-scale electrochemical synthesis of SnO2 nanoparticles, Journal of Materials Science, 43, 15, 2008. Crossref