年間 4 号発行
ISSN 印刷: 1093-3611
ISSN オンライン: 1940-4360
Indexed in
MODELING PECVD GROWTH OF NANOSTRUCTURED CARBON MATERIALS
要約
We present here some of our modeling efforts for PECVD growth of nanostructured carbon materials with focus on amorphous hydrogenated carbon. Experimental data from an expanding thermal plasma setup were used as input for the simulations. Attention was focused both on the film growth mechanism, as well as on the hydrocarbon reaction mechanisms during growth of the films. It is found that the reaction mechanisms and sticking coefficients are dependent on the specific surface sites, and the structural properties of the growth radicals. The film growth results are in correspondence with the experiment. Furthermore, it is found that thin a-C:H films can be densified using an additional H-flux towards the substrate.
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Popova Inna, Blagin Anatoly, Blagina Larisa, Lebedev Victor, Kinetics of formation and structural rebuilding crystalline films, Letters on Materials, 11, 1, 2021. Crossref