ライブラリ登録: Guest

SIMULATION OF A CHEMICAL VAPOR DEPOSITION: MOBILE AND IMMOBILE ZONES AND HOMOGENEOUS LAYERS

巻 1, 発行 2, 2010, pp. 123-143
DOI: 10.1615/SpecialTopicsRevPorousMedia.v1.i2.40
Get accessGet access

要約

This paper describes how we model chemical vapor deposition for metallic bipolar plates and optimization to deposit a homogeneous layer. Constraint on the deposition process are very low pressure (nearly vacuum) and low temperature (∼400 K). These constraints need catalytic process, and our apparatus deals with a plasma source and precursor gases [see Dobkin, M. K. and Zuraw, D. M. (Principles of Chemical Vapor Deposition, 1st ed., Springer, NY, 2003)]. Such a plasma has the advantage of accelerating the vaporization process [see Lieberman, M. A. and Lichtenberg, A. J. (Principle of Plasma Discharges and Materials Processing, 2st ed., Wiley-Interscience, Hoboken, NJ, 2005)], and of bringing the solid materials to a gaseous phase. Nevertheless, there are also some drawbacks, in that retardation and adsorption processes can hinder the direct transport to the target [see Lieberman and Lichtenberg (2005)]. Here, we present a mesoscopic model, which reflects the retardation, transport, and reaction of the gaseous species through homogeneous media in the chamber. The models include immobile gaseous phases, where the transport of the mobile gaseous species is hindered. Furthermore, the models include the conservation of mass and the porous media are in accordance with Darcy's law, which is an assumption for the flow processes of the gaseous phase. The transport through the stationary and ionized plasma field is treated as a diffusion-dominated flow with mobile and immobile zones [see Gobbert, M. K. and Ringhofer, C. A. (SIAM J. Appl. Math., vol. 58, pp. 737-752,1998) and Lieberman and Lichtenberg (2005)], where the metallic deposit and the gas chamber look like porous media [Rouch, H., (Proc. of the COMSOL Users Conf., Paris, pp. 1-7, 2006) and Cao, G. Z., Brinkman, H., Meijerink, J., DeVries, K. J., and Burggraaf A. J. (J. Mater. Chem.), vol. 3, no. 12, pp. 1307-1311, 1993)]. We choose porous ceramic membranes and gas catalysts like argon (Ar), (Cao et al., 1993) and apply our experience in simulating gaseous flow and modeling the penetration of such porous media [see Jin, S. and Wang, X. (J. Comput. Phys., vol. 179, no. 2, pp. 557-577, 2002)]. Numerical methods are developed to solve such multiscale and multiphase models. We have taken into account combined spatial discretization methods, based on finite volume methods and analytical test functions. Although implicit in time, discretized parts are solved with Runge-Kutta methods and iterative solvers coupled with mobile and immobile equation parts. The numerical experiments validate the modified discretization methods respecting their higher order results and their efficiencies. In real-life simulations of physical experiments, we discuss the validation of our model and the assumed deposition rates.

近刊の記事

HYDROMAGNETIC CASSON FLUID FLOW ACROSS AN INCLINED VERTICAL SURFACE IN POROUS CHANNEL WITH BUOYANCY AND THERMO-DIFFUSION EFFECTS Sowmiya C, Rushi Kumar B Effect of Helical Force on Thermal Convection of a Ferrofluid: A Weakly Non-linear Theory Jagathpally Sharathkumar Reddy, Kishan N, Shiva Kumar Reddy G, Ravi Ragoju STABILITY ANALYSIS OF A COUPLE-STRESS FLUID WITH VARIABLE GRAVITY IN A POROUS MEDIUM FOR DIFFERENT CONDUCTING BOUNDARIES Shalu Choudhary, Reeta Devi, Amit Mahajan, Sunil Sunil CREEPING FLOW ABOUT A TAINTED LIQUID DROP WITH A MICROPOLAR FLUID AND ALIGNED IN A POROUS MEDIUM FILLED WITH VISCOUS FLUID UTILISING SLIP PHANI KUMAR MEDURI, VIJAYA LAKSHMI KUNCHE Reviewing the Impact of Magnetic Prandtl Number and Magnetic Force Parameter on Convective Heat Transfer in Boundary Layers Hossam Nabwey, Muhammad Ashraf, Zia Ullah, Ahmed M. Rashad, Ali J. Chamkha Spectral Analysis for Entropy Generation and Irreversibility on NiZnFe_2O_4 – Engine Oil based Fluids RamReddy Chetteti, Sweta ., Pranitha Janapatla Study of global stability of rotating partially-ionized plasma saturating a porous medium Vishal Chandel, Sunil Kumar, Poonam Sharma Porous Medium Influenced Dissipative Hybrid Casson Nanofluid Flow over a Nonlinearly Stretching Sheet under Inclined Ohmic Lorentz Force Field A. R. Deepika, K. Govardhan, Hussain Basha, G Janardhana Reddy Effect of Motile Gyrotactic Microorganisms on Arterial Stenosis Sisko Nanofluid Flow Through Porous Medium : A Numerical Study Galal Moatimid, Mona Mohamed, Khaled Elagamy, Ahmed Gaber ELECTROTHERMOSOLUTAL CONVECTION IN NANOFLUID SATURATING POROUS MEDIUM Pushap Lata Sharma, Mohini Kapalta EFFECT OF VARIABLE GRAVITY ON THERMAL CONVECTION IN ROTATING JEFFREY NANOFLUID: DARCY-BRINKMAN MODEL Deepak Bains, Pushap Lata Sharma, Gian C. Rana Activation energy effect on MHD convective Maxwell nanofluid flow with Cattaneo-Christove heat flux over a porous stretching sheet JYOTHI NAGISETTY, VIJAYA KUMAR AVULA GOLLA Effects of different fins on Maxwell liquid under hybrid surveys of magnetic and porous material in presence of radiation factors Pooya Pasha, Payam Jalili, Bahram Jalili, Loghman Mostafa, Ahmed Mohammed Mahmood, Hussein Abdullah Abbas, D.D. Ganji
Begell Digital Portal Begellデジタルライブラリー 電子書籍 ジャーナル 参考文献と会報 リサーチ集 価格及び購読のポリシー Begell House 連絡先 Language English 中文 Русский Português German French Spain