RT Journal Article
ID 6d752ad26e7296e7
A1 Lopatin, I. V.
A1 Akhmadeev, Yuriy H.
A1 Koval, Nikolay N.
A1 Schanin, P. M.
T1 PLASMA GENERATION IN A LOW-PRESSURE HOLLOW-CATHODE NON-SELF-SUSTAINED GLOW DISCHARGE
JF High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
JO HTM
YR 2013
FD 2015-07-02
VO 17
IS 2-3
SP 117
OP 125
K1 hollow cathode
K1 non-self-sustained glow discharge
K1 microhardness
AB Research on a hollow-cathode non-self-sustained glow discharge demonstrates the feasibility of discharge operation at pressures from 0.1 Pa. Depending on experimental conditions, the discharge operating voltage can reach ~50 V, which is much lower than that of a self-sustained glow discharge in the same electrode system. The discharge current can range up to 30 A. The working gas is Ar, N2, and N-based gas mixtures. Probe measurements of the discharge plasma show that the electron temperature varies between 1.5 and 7 eV, depending on the pressure of gas and its kind, and the plasma density can reach 1011 cm−3 at 15-A currents. Nitriding in the discharge plasma at 600°C for 2 h made it possible to increase the hardness of Ti (VT1-0) 3.5 times and that of 12Cr18Ni10Ti three times, with a modified layer depth of 35 µm.
PB Begell House
LK https://www.dl.begellhouse.com/journals/57d172397126f956,7e8735f8127053c6,6d752ad26e7296e7.html