RT Journal Article ID 6d752ad26e7296e7 A1 Lopatin, I. V. A1 Akhmadeev, Yuriy H. A1 Koval, Nikolay N. A1 Schanin, P. M. T1 PLASMA GENERATION IN A LOW-PRESSURE HOLLOW-CATHODE NON-SELF-SUSTAINED GLOW DISCHARGE JF High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes JO HTM YR 2013 FD 2015-07-02 VO 17 IS 2-3 SP 117 OP 125 K1 hollow cathode K1 non-self-sustained glow discharge K1 microhardness AB Research on a hollow-cathode non-self-sustained glow discharge demonstrates the feasibility of discharge operation at pressures from 0.1 Pa. Depending on experimental conditions, the discharge operating voltage can reach ~50 V, which is much lower than that of a self-sustained glow discharge in the same electrode system. The discharge current can range up to 30 A. The working gas is Ar, N2, and N-based gas mixtures. Probe measurements of the discharge plasma show that the electron temperature varies between 1.5 and 7 eV, depending on the pressure of gas and its kind, and the plasma density can reach 1011 cm−3 at 15-A currents. Nitriding in the discharge plasma at 600°C for 2 h made it possible to increase the hardness of Ti (VT1-0) 3.5 times and that of 12Cr18Ni10Ti three times, with a modified layer depth of 35 µm. PB Begell House LK https://www.dl.begellhouse.com/journals/57d172397126f956,7e8735f8127053c6,6d752ad26e7296e7.html