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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
SJR: 0.176 SNIP: 0.48 CiteScore™: 1.3

ISSN Print: 1093-3611
ISSN Online: 1940-4360

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.v1.i1.20
pages 17-39

THE INDUCTIVELY COUPLED RADIO FREQUENCY PLASMA

Maher I. Boulos
Department of Chemical Engineering University of Sherbrooke, 2500 Blvd. de lUniversite Sherbrooke J1К 2R1, PQ - Canada

ABSTRACT

A review is presented of recent developments in radio frequency (r.f.) induction plasma technology. The topics covered include; plasma torch developments, fundamental studies of plasma dynamics, heat and mass transfer, plasma and particle diagnostics. Current and potential applications of induction plasma technology for materials processing are described including powder spheroidization and densification, induction plasma vacuum spraying (IPVS), induction plasma reactive deposition (IPRD) and induction plasma synthesis of ultrafine powders (UFP).


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