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Page d'accueil ICHMT DL Année en cours Archives Comité de direction Centre international pour le transfert de chaleur et de masse


DOI: 10.1615/ICHMT.2014.IntSympConvHeatMassTransf.1130
pages 1505-1516

Ersin Sayar
Department of Mechanical Engineering Istanbul Technical University, Istanbul, Turkey

Bakhtier Farouk
Department of Mechanical Engineering and Mechanics, Drexel University, Philadelphia, Pennsylvania 19104, USA


A bulk acoustic wave piezoelectric valveless micropump consisting of trapezoidal prism inlet/outlet elements; the pump chamber, a thin structural layer and a piezoelectric transducer element, as the actuator is investigated. Dynamic structural and fluid flow analysis of the micropump are carried out for the transport of water. Governing equations for the flow fields and the structuralpiezoelectric bi-layer membrane motions are considered. Flow contraction and expansion, through the trapezoidal prism inlet and outlet respectively, generates net fluid flow in the investigated micropump. The effects of the piezoelectric transducer material on the flow rate are investigated for several commonly used actuators: PZT-5A, PZT-4, and BaTiO3. The net flow rate developed by the pump varies with the piezoelectric material. PZT-5A actuator generates the largest pump net flow, and the BaTiO3 actuator results in the lowest pump flow. The findings imply that PZT-5A as the micropump actuator is advantageous to generate a high pump flow. In some applications where pumping precision is important BaTiO3 should be the material of choose. Comparison of the pumping characteristics of the micropumps operating with different piezoelectric transducer materials can be utilized to design MEMS based micropumps in drug delivery and biomedical applications especially if lead contamination originating from PZT has to be avoided such as in vivo applications.

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