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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
SJR: 0.137 SNIP: 0.341 CiteScore™: 0.43

ISSN Imprimer: 1093-3611
ISSN En ligne: 1940-4360

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

DOI: 10.1615/HighTempMatProc.2018025792
pages 7-15

STRUCTURAL FEATURES OF THE FORMATION OF MULTICOMPONENT AND HIGH-ENTROPY TRANSITION METAL NITRIDE FILMS

Alexander D. Pogrebnjak
Department of Nanoelectronics, Sumy State University, 2 Rimsky-Korsakov Str., 40007 Sumy, Ukraine
Alexander Goncharov
Department of Applied Mathematics and Complex Systems, Sumy State University, 2 Rimsky-Korsakov Str., 40007 Sumy, Ukraine
Andrey Yunda
Department of Applied Mathematics and Complex Systems, Sumy State University, 2 Rimsky-Korsakov Str., 40007 Sumy, Ukraine
Igor Shelest
Department of Applied Mathematics and Complex Systems, Sumy State University, 2 Rimsky-Korsakov Str., 40007 Sumy, Ukraine
Antoni Swic
Faculty of Mechanical Engineering, Lublin University of Technology, 38D Nadbystrzycka Str., 20–618 Lubliт, Poland
Ihor Lebedynskyi
Department of Power Engineering, Sumy State University, 2 Rimsky-Korsakov Str., Sumy, 40000, Ukraine

RÉSUMÉ

A comparative analysis of the microstructure and properties of coatings has been made based on multicomponent and high-entropy transition metal nitride films, depending on the deposition conditions (temperature, bias potential, partial pressure, etc.). The structural features of the films have been analyzed. The general regularities of hard and superhard nanostructured nanocomposite coatings consisting of a columnar structure and texture growth were identified. The influence of the structural state on the change of the physical and mechanical properties of nanostructured coatings based on multicomponent and high-entropy transition metal nitride films has been found.