Abonnement à la biblothèque: Guest
Special Topics & Reviews in Porous Media: An International Journal

Publication de 4  numéros par an

ISSN Imprimer: 2151-4798

ISSN En ligne: 2151-562X

The Impact Factor measures the average number of citations received in a particular year by papers published in the journal during the two preceding years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) IF: 1.1 To calculate the five year Impact Factor, citations are counted in 2017 to the previous five years and divided by the source items published in the previous five years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) 5-Year IF: 1.5 The Immediacy Index is the average number of times an article is cited in the year it is published. The journal Immediacy Index indicates how quickly articles in a journal are cited. Immediacy Index: 0.5 The Eigenfactor score, developed by Jevin West and Carl Bergstrom at the University of Washington, is a rating of the total importance of a scientific journal. Journals are rated according to the number of incoming citations, with citations from highly ranked journals weighted to make a larger contribution to the eigenfactor than those from poorly ranked journals. Eigenfactor: 0.00018 The Journal Citation Indicator (JCI) is a single measurement of the field-normalized citation impact of journals in the Web of Science Core Collection across disciplines. The key words here are that the metric is normalized and cross-disciplinary. JCI: 0.42 SJR: 0.217 SNIP: 0.362 CiteScore™:: 2.3 H-Index: 19

Indexed in

MODEL OF PE-CVD APPARATUS: ELECTRICAL FIELDS AND DEPOSITION GEOMETRY

Volume 1, Numéro 3, 2010, pp. 215-229
DOI: 10.1615/SpecialTopicsRevPorousMedia.v1.i3.30
Get accessGet access

RÉSUMÉ

Our study focuses on the simulation of thin film deposition processes that can be realized by PE-CVD (plasma enhanced chemical vapor deposition) processes (Geiser and Arab, 2010; Ohring, 2002; Tai and Chou, 1990). The transport processes can be modelled with porous media models in different permeable layers (Geiser and Arab, 2010). For the deposition process, the influence of the electric fields in a plasma reactor is very important and can homogenize the deposited layers (Rudniak, 1998). This aspect of controlling deposition in a reactor can be modelled as permeable layers to accelerate or retard a deposition species in the porous media. A macro-model of the physical processes on the scale of the apparatus is presented as a multiphysics model. The flux field can be solved independently by a Navier-Stokes equation, while the tranport process is solved by a convection-diffusion reaction equation with the computed flux field embedded in it. In addition, the convection-diffusion reaction equation underlies sorption processes which simulate the transport of gaseous species in the apparatus in a given vector field with mobile and immobile zones (Geiser and Arab, 2010). We consider the same spatial grid for the equations and update the velocity field (Fein, 2004). The numerical experiments can give qualitative rates of deposition under the influence of the electric field (Rudniak, 1998). Furthermore, we have simulated the intricate geometry of the metallic plates to give homogeneous deposition in the channels.

CITÉ PAR
  1. Geiser Jürgen, Model order reduction for numerical simulation of particle transport based on numerical integration approaches, Mathematical and Computer Modelling of Dynamical Systems, 20, 4, 2014. Crossref

  2. Geiser J., Arab M., Modeling and Simulation of a Chemical Vapor Deposition, Journal of Applied Mathematics, 2011, 2011. Crossref

  3. Geiser Jürgen, Multiscale modelling and splitting approaches for fluids composed of Coulomb-interacting particles, Mathematical and Computer Modelling of Dynamical Systems, 24, 4, 2018. Crossref

Prochains articles

HYDROMAGNETIC CASSON FLUID FLOW ACROSS AN INCLINED VERTICAL SURFACE IN POROUS CHANNEL WITH BUOYANCY AND THERMO-DIFFUSION EFFECTS Sowmiya C, Rushi Kumar B Effect of Helical Force on Thermal Convection of a Ferrofluid: A Weakly Non-linear Theory Jagathpally Sharathkumar Reddy, Kishan N, Shiva Kumar Reddy G, Ravi Ragoju STABILITY ANALYSIS OF A COUPLE-STRESS FLUID WITH VARIABLE GRAVITY IN A POROUS MEDIUM FOR DIFFERENT CONDUCTING BOUNDARIES Shalu Choudhary, Reeta Devi, Amit Mahajan, Sunil Sunil CREEPING FLOW ABOUT A TAINTED LIQUID DROP WITH A MICROPOLAR FLUID AND ALIGNED IN A POROUS MEDIUM FILLED WITH VISCOUS FLUID UTILISING SLIP PHANI KUMAR MEDURI, VIJAYA LAKSHMI KUNCHE Reviewing the Impact of Magnetic Prandtl Number and Magnetic Force Parameter on Convective Heat Transfer in Boundary Layers Hossam Nabwey, Muhammad Ashraf, Zia Ullah, Ahmed M. Rashad, Ali J. Chamkha Spectral Analysis for Entropy Generation and Irreversibility on NiZnFe_2O_4 – Engine Oil based Fluids RamReddy Chetteti, Sweta ., Pranitha Janapatla Study of global stability of rotating partially-ionized plasma saturating a porous medium Vishal Chandel, Sunil Kumar, Poonam Sharma Porous Medium Influenced Dissipative Hybrid Casson Nanofluid Flow over a Nonlinearly Stretching Sheet under Inclined Ohmic Lorentz Force Field A. R. Deepika, K. Govardhan, Hussain Basha, G Janardhana Reddy Effect of Motile Gyrotactic Microorganisms on Arterial Stenosis Sisko Nanofluid Flow Through Porous Medium : A Numerical Study Galal Moatimid, Mona Mohamed, Khaled Elagamy, Ahmed Gaber ELECTROTHERMOSOLUTAL CONVECTION IN NANOFLUID SATURATING POROUS MEDIUM Pushap Lata Sharma, Mohini Kapalta EFFECT OF VARIABLE GRAVITY ON THERMAL CONVECTION IN ROTATING JEFFREY NANOFLUID: DARCY-BRINKMAN MODEL Deepak Bains, Pushap Lata Sharma, Gian C. Rana Activation energy effect on MHD convective Maxwell nanofluid flow with Cattaneo-Christove heat flux over a porous stretching sheet JYOTHI NAGISETTY, VIJAYA KUMAR AVULA GOLLA Effects of different fins on Maxwell liquid under hybrid surveys of magnetic and porous material in presence of radiation factors Pooya Pasha, Payam Jalili, Bahram Jalili, Loghman Mostafa, Ahmed Mohammed Mahmood, Hussein Abdullah Abbas, D.D. Ganji
Portail numérique Bibliothèque numérique eBooks Revues Références et comptes rendus Collections Prix et politiques d'abonnement Begell House Contactez-nous Language English 中文 Русский Português German French Spain