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Telecommunications and Radio Engineering
SJR: 0.203 SNIP: 0.44 CiteScore™: 1

ISSN Imprimer: 0040-2508
ISSN En ligne: 1943-6009

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Telecommunications and Radio Engineering

DOI: 10.1615/TelecomRadEng.v71.i3.80
pages 265-276

QUANTITATIVE ESTIMATION OF PHYSICAL PROCESSES AT A CONTACTLESS SCANNING MICROWAVE MICROSCOPY

Yu. Ye. Gordienko
A.Ya. Usikov Institute for Radiophysics and Electronics of the National Academy of Sciences of Ukraine 12, Academician Proskura St., Kharkiv 61085, Ukraine; Kharkiv National University of Radio Engineering and Electronics, 14 Nauka Ave, Kharkiv, 61166, Ukraine
S. Yu. Larkin
Kharkov National University of Radio Engineering and Electronics, 14, Lenin Ave, Kharkiv, 61166, Ukraine
A. M. Prokaza
Kharkov National University of Radio Engineering and Electronics, 14, Lenin Ave, Kharkiv, 61166, Ukraine

RÉSUMÉ

Electromagnetic properties of resonator probes with coaxial measuring aperture, which are widely used in scanning microwave microscopy (SMM), are studied in this paper. Quantitative estimations of dependence of the dimensions of near-field localization and the spatial distribution of its components upon the aperture geometry, shape of the point and the size of the air gap between the object and the aperture of the resonator measurement sensor (RMS) are determined. The influence of the gap upon electromagnetic properties and characteristics of the system «microwave probe − air gap − object» is also investigated.
It is demonstrated that availability of the gap exerts a substantial influence upon the value of spatial resolution of the microprobes and results in essential loss of sensitivity by the microwave sensor of the SMM.
The obtained results might serve as the basis for the general theory of resonator microprobes with coaxial measuring aperture for SMM semiconductors and dielectrics possessing sub-micron resolution values.


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