%0 Journal Article %A Bhowmick, S. %A Leo, Orlando %A Coppola, Giuseppe %A Gioffrè, Mariano %A Musto, Marilena %A Rotondo, Giuseppe %A Iodice, Mario %D 2019 %I Begell House %K pyroelectric fields, lithium niobate, Joule effect, thermal effect analysis %N 1-2 %P 17-28 %R 10.1615/ComputThermalScien.2018024691 %T PYROELECTRIC EFFECT CONTROL: DESIGN, FABRICATION, AND CHARACTERIZATION OF A MICROHEATERS ARRAY FOR BIOMEDICAL APPLICATIONS %U https://www.dl.begellhouse.com/journals/648192910890cd0e,7344e09e13d9db41,769ecd637e88ec4c.html %V 11 %X An innovative microheater array design is realized on a lithium niobate crystal, to induce a uniform pyroelectric effect on an area of 12.5 × 12.5 mm2. Thermal analyses of the device were performed both experimentally and numerically using a FLIR thermocamera and COMSOLTM Multiphysics.A series of preliminary numerical simulations were carried out to obtain the optimized design of the aforementioned specifications. The microheaters were fabricated on the + Z surface of the lithium niobate crystal using a photolithography process followed by titanium thin-film deposition. We performed on this device a series of electrothermal characterizations; the results of the measurements showed good agreement with the numerical model in terms of heat distribution, accomplishing a comparison between the thermal maps coming from the two methodologies. %8 2018-09-11