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High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes

Publicado 4 números por año

ISSN Imprimir: 1093-3611

ISSN En Línea: 1940-4360

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INFLUENCE OF TEMPERATURE ON HIGH-FIELD INJECTION MODIFICATION OF MIS STRUCTURES WITH THERMAL SiO2 FILMS DOPED WITH PHOSPHORUS

Volumen 23, Edición 4, 2019, pp. 303-312
DOI: 10.1615/HighTempMatProc.2019031840
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SINOPSIS

The paper presents a study of the processes of electron trapping in metal-insulator-semiconductor (MIS) structures with gate dielectric based on silicone dioxide doped with phosphorus under high-field Fowler−Nordheim tunnel injection of electrons in a range of temperatures from 293 to 373 K. We have ascertained that the negative charge being trapped in phosphosilicate glass (PSG) consisted of two components with a different energy of the thermal ionization ΔEa1 = 0.2-0.3 eV and ΔEa2 = 1.0-1.2 eV. A part of the charge with a low energy of the thermal ionization virtually drain off at annealing temperature of 473 K for a period of time of 20 min and then the dielectric contains only the thermostable part of the negative charge that can be utilized to correct the threshold voltage of MIS transistors. We have ascertained that an implementation of the high-field tunnel injection of electrons for MIS structures with SO2-PSG gate dielectric has raised not only density of negative charge trapped but also its thermostable component.

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CITADO POR
  1. Andreev D. V., Bondarenko G. G., Andreev V. V., Stolyarov A. A., Increasing the Charge Stability of Gate Dielectric Films of MIS Structures by Doping Them with Phosphorus, Inorganic Materials: Applied Research, 12, 2, 2021. Crossref

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