%0 Journal Article %A Vinogradov, A. Ya. %A Andronov, A. N. %A Ustinov, A. B %A Orlov, K. E. %A Smirnov, A. S. %D 2006 %I Begell House %N 3 %P 457-466 %R 10.1615/HighTempMatProc.v10.i3.90 %T LOW TEMPERATURE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON FILMS ON DIFFERENT SUBSTRATES %U https://www.dl.begellhouse.com/journals/57d172397126f956,129b3bee3f245137,67b9552700cab4bd.html %V 10 %X Polymer and diamond like carbon thin films were deposited at temperature below 250°C by high frequency (40−60 MHz) plasma enhanced chemical vapor deposition. The films have been successfully deposited on metal (Ti, Cu, Mo, Ta, Ni, Pt), silicon, germanium, ceramic, quarts and glass flat substrates as well as on 3-D objects: metal balls, washer, tips, cones. Electron field emission, optical and electrical properties, mechanical and tribological behavior of the films were studied in comparison with their structure, phase and chemical composition. Plasma pre-treatment of the substrate, ion bombardment and etching of growing film surface were found to be the key factors of the film deposition process. %8 2006-12-01