%0 Journal Article %A Piot, O. %A Gautier , C. %A Machet , J. %D 1998 %I Begell House %K texture, residual stress, chromium, chromium nitride, coatings %N 3 %P 391-399 %R 10.1615/HighTempMatProc.v2.i3.80 %T RESIDUAL STRESS IN PVD COATINGS - RELATIONSHIP BETWEEN STRESS AND TEXTURE %U https://www.dl.begellhouse.com/journals/57d172397126f956,423052260f19c0dc,5c57e0ee383ff79e.html %V 2 %X The main purpose of this work is the study of the relationship between the stress and the texture of films of chromium and chromium nitride deposited by different PVD techniques (Vacuum Evaporation, Ion Plating, Vacuum Arc Evaporation).
The effect of two deposition parameters, the substrate temperature and the substrate bias voltage has been investigated. The residual stress has been measured by the analysis of the stress induced sample bending [1]. %8 1998-08-30