@article{Rat_2011 author = {V. Rat and P. Andre and Jacque Aubreton and M. F. Elchinger and Pierre Fauchais and A. Lefort}, title = {COMPARATIVE STUDY BETWEEN KINETIC AND THERMODYNAMIC CALCULATION OF COMPOSITION IN SF6 PLASMAS}, journal = {High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes}, issn = {1093-3611}, year = {2011}, volume = {15}, number = {2}, pages = {105--113} }