@article{Bondariev_2018 author = {Vitalii A. Bondariev and Valentina A. Gorushko and Vladimir A. Pilipenko and Vitaly A. Solodukha}, title = {CHARACTERISTIC FEATURES OF HEATING SEMICONDUCTOR SILICON STRUCTURES DURING RAPID THERMAL TREATMENT IN THE VLSI TECHNOLOGY}, journal = {High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes}, issn = {1093-3611}, year = {2018}, volume = {22}, number = {1}, pages = {1--6} }