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高温材料处理:国际期刊
SJR: 0.137 SNIP: 0.341 CiteScore™: 0.43

ISSN 打印: 1093-3611
ISSN 在线: 1940-4360

高温材料处理:国际期刊

DOI: 10.1615/HighTempMatProc.v11.i1.20
pages 21-36

MODELING OF THE SYNTHESIS AND SUBSEQUENT GROWTH OF NANOPARTICLES IN DUSTY PLASMAS

Kathleen De Bleecker
PLASMANT, Department of Chemistry, University of Antwerp, Universiteitsplein 1, B-2610 Wilrijk-Antwerp, Belgium
Annemie Bogaerts
University of Antwerp, Department of Chemistry, PLASMANT Research Group, Universiteitsplein 1, 2610 Antwerp, Belgium

ABSTRACT

The initial mechanisms of dust formation in radiofrequency acetylene (C2H2) plasmas are investigated by means of a self-consistent 1D fluid model. Possible routes for particle growth are discussed and a comparison with particle formation in silane (SiH4) discharges is made. The model considers a set of 39 species, including neutrals, radicals, ions and electrons, describing hydrocarbons (CnHm) containing up to 12 carbon atoms. Both successive anion/cation - molecule reactions seem to lead to a fast build up of the carbon skeleton.