每年出版 4 期
ISSN 打印: 1093-3611
ISSN 在线: 1940-4360
IF:
0.4
Immediacy Index:
0.1
Eigenfactor:
0.00005
JCI:
0.07
SJR:
0.198
SNIP:
0.48
CiteScore™::
1.1
H-Index:
20
Indexed in
CALCULATION OF RF PLASMA TORCH PARAMETERS BY MEANS OF NON-EQUILIBRIUM MODEL OF AR PLASMA
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摘要
Calculation of RF plasma torch parameters was made by means of non-equilibrium model of plasma. In this study it was calculated RF ICP plasma torch by frequency 28 MHz; power 2-4 kW, inner diameter of the torch 24 mm, plasma gas - argon. Plasma torch has three axial gas flows: sheath gas G1 = 20 l/min, plasma gas G2 = 2.4 l/min, transport gas G3 = 3.4 l/min. Calculations have been performed within the frame of the method of the control volume. The results show that the injection of transport gas in the axis plasma zone leads to a strong disturbance of a thermal equilibrium and a cooling of the axis zone.
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