每年出版 4 期
ISSN 打印: 1093-3611
ISSN 在线: 1940-4360
Indexed in
ABOUT ROTATIONAL TEMPERATURE MEASUREMENTS AND THERMODYNAMIC EQUILIBRIUM IN RF GLOW DISCHARGES
摘要
The rotational temperature of the А2Δ excited state of SiH has been determined in a silane r.f. glow-discharge by optical emission spectroscopy, using both a revised Boltzman diagram method and a detailed simulation of the emission spectrum utilising a least squares fitting (LSF) method. It is shown here that the LSF is more reliable and a careful use can lead to accurate results. This is accomplished by using an improved term value formula and an optimisation of the set of constants are used to calculate the best possible simulation of the spectrum. On the other hand, important informations about the achievement of thermodynamic equilibrium are obtained, with the use of the Boltzman plot method. It is shown that the population distribution in the rotational levels of a short-lived electronic state is well described by Boltzman statistics. In both methods, the experimentally determined FWHM of the optical system is of major importance.