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ISSN 打印: 1065-5131

ISSN 在线: 1563-5074

The Impact Factor measures the average number of citations received in a particular year by papers published in the journal during the two preceding years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) IF: 2.3 To calculate the five year Impact Factor, citations are counted in 2017 to the previous five years and divided by the source items published in the previous five years. 2017 Journal Citation Reports (Clarivate Analytics, 2018) 5-Year IF: 1.8 The Immediacy Index is the average number of times an article is cited in the year it is published. The journal Immediacy Index indicates how quickly articles in a journal are cited. Immediacy Index: 0.2 The Eigenfactor score, developed by Jevin West and Carl Bergstrom at the University of Washington, is a rating of the total importance of a scientific journal. Journals are rated according to the number of incoming citations, with citations from highly ranked journals weighted to make a larger contribution to the eigenfactor than those from poorly ranked journals. Eigenfactor: 0.00037 The Journal Citation Indicator (JCI) is a single measurement of the field-normalized citation impact of journals in the Web of Science Core Collection across disciplines. The key words here are that the metric is normalized and cross-disciplinary. JCI: 0.6 SJR: 0.433 SNIP: 0.593 CiteScore™:: 4.3 H-Index: 35

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CONTROL OF OXYGEN TRANSPORT IN THE MELT OF A CZOCHRALSKI-SILICON CRYSTAL GROWTH

卷 19, 册 6, 2012, pp. 505-514
DOI: 10.1615/JEnhHeatTransf.2012006000
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摘要

The concentration and distribution of oxygen incorporated into a grown crystal have significant effects on the silicon crystal quality. We investigated the influences of different parameters on the oxygen transport in the melt in a Czochralski-silicon (CZ-Si) crystal growth. First, the effects of transverse magnetic fields on the melt convection and oxygen transport were investigated. It was found that the oxygen transported from the crucible walls to the melt−crystal interface is effectively reduced with transverse magnetic fields. Then, the effects of crucible and crystal rotation rates on the oxygen transport were investigated under transverse magnetic field conditions. The results showed that increases in the crystal and crucible rotation rates both change the bulk flow structures and lead to an increase in the oxygen concentration at the melt−crystal interface. The influences of crucible rotation rate are more intensive than that of the crystal rotation rate.

对本文的引用
  1. Sun Dongliang, Wang Yanning, Shen Linqian, Yu Bo, Hou Yan, Zou Yu, Performance analyses of the IDEAL algorithm combined with the fuzzy control method for 3D incompressible fluid flow and heat transfer problems, Numerical Heat Transfer, Part B: Fundamentals, 69, 5, 2016. Crossref

  2. Sun Dongliang, Yu Shuai, Yu Bo, Wang Peng, Liu Wenjing, A VOSET method combined with IDEAL algorithm for 3D two-phase flows with large density and viscosity ratio, International Journal of Heat and Mass Transfer, 114, 2017. Crossref

  3. Cao Zhizhu, Zhou Jie, Wei Jinjia, Sun Dongliang, Yu Bo, Experimental and numerical study on bubble dynamics and heat transfer during nucleate boiling of FC-72, International Journal of Heat and Mass Transfer, 139, 2019. Crossref

  4. Zhao Wenhan, Li Jiancheng, Liu Lijun, Control of Oxygen Impurities in a Continuous-Feeding Czochralski-Silicon Crystal Growth by the Double-Crucible Method, Crystals, 11, 3, 2021. Crossref

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